CHARACTERIZATION OF HE/CH4 DC GLOW-DISCHARGE PLASMAS BY OPTICAL-EMISSION SPECTROSCOPY, MASS-SPECTROMETRY, AND ACTINOMETRY

by DELACAL, E., TAFALLA, D. and TABARES, F. L.
Reference:
CHARACTERIZATION OF HE/CH4 DC GLOW-DISCHARGE PLASMAS BY OPTICAL-EMISSION SPECTROSCOPY, MASS-SPECTROMETRY, AND ACTINOMETRY (DELACAL, E., TAFALLA, D. and TABARES, F. L.), In JOURNAL OF APPLIED PHYSICS, volume 73, 1993.
Bibtex Entry:
@article{nr991,
	Author = {DELACAL, E. and TAFALLA, D. and TABARES, F. L.},
	Date = {JAN 15 1993},
	Date-Added = {2013-10-12 14:28:32 +0000},
	Date-Modified = {2013-10-12 14:28:32 +0000},
	Doi = {10.1063/1.353308},
	Isi = {WOS:A1993KG47600063},
	Issn = {0021-8979},
	Journal = {JOURNAL OF APPLIED PHYSICS},
	Month = {Jan},
	Number = {2},
	Pages = {948--954},
	Publication-Type = {J},
	Times-Cited = {19},
	Title = {CHARACTERIZATION OF HE/CH4 DC GLOW-DISCHARGE PLASMAS BY OPTICAL-EMISSION SPECTROSCOPY, MASS-SPECTROMETRY, AND ACTINOMETRY},
	Volume = {73},
	Year = {1993},
	Z8 = {0},
	Z9 = {19},
	ZB = {0},
	ZS = {0},
	Bdsk-Url-1 = {http://dx.doi.org/10.1063/1.353308}}