KINETICS OF HYDROCARBON FORMATION IN A-C-H FILM DEPOSITION PLASMAS

by DELACAL, E. and TABARES, F. L.
Reference:
KINETICS OF HYDROCARBON FORMATION IN A-C-H FILM DEPOSITION PLASMAS (DELACAL, E. and TABARES, F. L.), In JOURNAL OF NUCLEAR MATERIALS, volume 200, 1993.
Bibtex Entry:
@article{nr986,
	Author = {DELACAL, E. and TABARES, F. L.},
	CL = {THE HAGUE, NETHERLANDS},
	CT = {SESSION ON FUSION TECHNOLOGY AND PLASMA, AT THE 12TH INTERNATIONAL VACUUM CONGRESS / 8TH INTERNATIONAL CONF ON SOLID SURFACES ( IVC-12 / ICSS-8 )},
	CY = {OCT 12-16, 1992},
	Date = {MAY 1993},
	Date-Added = {2013-10-12 14:28:32 +0000},
	Date-Modified = {2013-10-12 14:28:32 +0000},
	Doi = {10.1016/0022-3115(93)90321-O},
	Isi = {WOS:A1993LB37100028},
	Issn = {0022-3115},
	Journal = {JOURNAL OF NUCLEAR MATERIALS},
	Month = {May},
	Number = {3},
	Pages = {426--429},
	Publication-Type = {J},
	SP = {INT UNION VACUUM SCI TECH & APPLICAT; NETHERLAND VACUUM SOC},
	Times-Cited = {2},
	Title = {KINETICS OF HYDROCARBON FORMATION IN A-C-H FILM DEPOSITION PLASMAS},
	Volume = {200},
	Year = {1993},
	Z8 = {0},
	Z9 = {2},
	ZB = {0},
	ZS = {0},
	Bdsk-Url-1 = {http://dx.doi.org/10.1016/0022-3115(93)90321-O}}