Mass spectrometric studies of the mechanism of film inhibition in hydrogen/methane plasmas in the presence of nitrogen

by Tabares, F. L., Tafalla, D., Tanarro, I., Herrero, V. J. and Islyaikin, A. M.
Reference:
Mass spectrometric studies of the mechanism of film inhibition in hydrogen/methane plasmas in the presence of nitrogen (Tabares, F. L., Tafalla, D., Tanarro, I., Herrero, V. J. and Islyaikin, A. M.), In VACUUM, volume 73, 2004.
Bibtex Entry:
@article{nr671,
	Author = {Tabares, F. L. and Tafalla, D. and Tanarro, I. and Herrero, V. J. and Islyaikin, A. M.},
	CL = {Berlin, GERMANY},
	CT = {European Vacuum Congress},
	CY = {2003},
	Date = {MAR 19 2004},
	Date-Added = {2013-10-12 14:28:31 +0000},
	Date-Modified = {2013-10-12 14:28:31 +0000},
	Doi = {10.1016/j.vacuum.2003.12.045},
	Isi = {WOS:000220129600006},
	Issn = {0042-207X},
	Journal = {VACUUM},
	Month = {Mar},
	Number = {2},
	Pages = {161--167},
	Publication-Type = {J},
	SP = {Natl Vacuum Soc},
	Times-Cited = {15},
	Title = {Mass spectrometric studies of the mechanism of film inhibition in hydrogen/methane plasmas in the presence of nitrogen},
	Volume = {73},
	Year = {2004},
	Z8 = {0},
	Z9 = {15},
	ZB = {0},
	ZS = {0},
	Bdsk-Url-1 = {http://dx.doi.org/10.1016/j.vacuum.2003.12.045}}