Removal of carbon deposits in narrow gaps by oxygen plasmas at low pressure

by Ferreira, J. A., Tabares, F. L. and Tafalla, D.
Reference:
Removal of carbon deposits in narrow gaps by oxygen plasmas at low pressure (Ferreira, J. A., Tabares, F. L. and Tafalla, D.), In JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, volume 25, 2007.
Bibtex Entry:
@article{nr493,
	Author = {Ferreira, J. A. and Tabares, F. L. and Tafalla, D.},
	Date = {JUL-AUG 2007},
	Date-Added = {2013-10-12 14:28:31 +0000},
	Date-Modified = {2013-10-12 14:28:31 +0000},
	Doi = {10.1116/1.2746046},
	Isi = {WOS:000248491700017},
	Issn = {0734-2101},
	Journal = {JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A},
	Month = {Jul-Aug},
	Number = {4},
	Pages = {746--750},
	Publication-Type = {J},
	Times-Cited = {10},
	Title = {Removal of carbon deposits in narrow gaps by oxygen plasmas at low pressure},
	Volume = {25},
	Year = {2007},
	Z8 = {0},
	Z9 = {10},
	ZB = {0},
	ZS = {0},
	Bdsk-Url-1 = {http://dx.doi.org/10.1116/1.2746046}}