On the mechanism of nitrogenated carbon film deposition by PACVD in the presence of nitrogen: A cryo-trapping assisted mass spectrometric study

by Tabares, Francisco L., Tafalla, David and Antonio Ferreira, Jose
Reference:
On the mechanism of nitrogenated carbon film deposition by PACVD in the presence of nitrogen: A cryo-trapping assisted mass spectrometric study (Tabares, Francisco L., Tafalla, David and Antonio Ferreira, Jose), In CHEMICAL VAPOR DEPOSITION, volume 13, 2007.
Bibtex Entry:
@article{nr492,
	Author = {Tabares, Francisco L. and Tafalla, David and Antonio Ferreira, Jose},
	Date = {JUL 2007},
	Date-Added = {2013-10-12 14:28:31 +0000},
	Date-Modified = {2013-10-12 14:28:31 +0000},
	Doi = {10.1002/cvde.200606556},
	Isi = {WOS:000248381800010},
	Issn = {0948-1907},
	Journal = {CHEMICAL VAPOR DEPOSITION},
	Month = {Jul},
	Number = {6-7},
	Pages = {335--344},
	Publication-Type = {J},
	Times-Cited = {6},
	Title = {On the mechanism of nitrogenated carbon film deposition by PACVD in the presence of nitrogen: A cryo-trapping assisted mass spectrometric study},
	Volume = {13},
	Year = {2007},
	Z8 = {0},
	Z9 = {6},
	ZB = {0},
	ZS = {0},
	Bdsk-Url-1 = {http://dx.doi.org/10.1002/cvde.200606556}}