Cleaning efficiency of carbon films by oxygen plasmas in the presence of metallic getters

by Tabares, F. L., Ferreira, J. A., Tafalla, D., Tanarro, I., Herrero, V. J., Mendez, I., Gomez-Aleixandre, C. and Albella, J. M.
Reference:
Cleaning efficiency of carbon films by oxygen plasmas in the presence of metallic getters (Tabares, F. L., Ferreira, J. A., Tafalla, D., Tanarro, I., Herrero, V. J., Mendez, I., Gomez-Aleixandre, C. and Albella, J. M.), volume 100, 2008.
Bibtex Entry:
@misc{nr438,
	Author = {Tabares, F. L. and Ferreira, J. A. and Tafalla, D. and Tanarro, I. and Herrero, V. J. and Mendez, I. and Gomez-Aleixandre, C. and Albella, J. M.},
	BE = {Johansson, LSO Andersen, JN Gothelid, M Helmersson, U Montelius, L Rubel, M Setina, J Wernersson, LE},
	BN = {*****************},
	Booktitle = {Journal of Physics Conference Series},
	CL = {Stockholm, SWEDEN},
	CT = {17th International Vacuum Congress/13th International Conference on Surface Science/Internatinal Conference on Nanoscience and Technology},
	CY = {JUL 02-06, 2007},
	Date = {2008},
	Date-Added = {2013-10-12 14:28:31 +0000},
	Date-Modified = {2013-10-12 14:28:31 +0000},
	Doi = {10.1088/1742-6596/100/6/062025},
	Isi = {WOS:000275655200221},
	Issn = {1742-6588},
	Journal = {PROCEEDINGS OF THE 17TH INTERNATIONAL VACUUM CONGRESS/13TH INTERNATIONAL CONFERENCE ON SURFACE SCIENCE/INTERNATIONAL CONFERENCE ON NANOSCIENCE AND TECHNOLOGY},
	Pages = {062025},
	Publication-Type = {S},
	SP = {Swedish Vacuum Soc},
	Times-Cited = {1},
	Title = {Cleaning efficiency of carbon films by oxygen plasmas in the presence of metallic getters},
	Volume = {100},
	Year = {2008},
	Z8 = {0},
	Z9 = {1},
	ZB = {0},
	ZS = {0},
	Bdsk-Url-1 = {http://dx.doi.org/10.1088/1742-6596/100/6/062025}}